metallo organic vapor phase epitaxy

This paper was overviewed the basic properties of GaN-based material,analyzed key technologies in making blue GaN-based LEDs,such as MOVPE,P-doping ohmic contact,etching and chip dicing saw,and introduced recent progresses of technologies at present.

本文首先综述了GaN基材料的基本特性,分析了GaN基蓝光LED制程的关键技术如金属有机物气相外延,P型掺杂,欧姆接触,刻蚀工艺,芯片切割技术,介绍了目前各项技术的工艺现状,最后指出了需要改进的问题,展望了末来的研究方向。

The relation between control parameters and the Al solid\|vapor distribution coefficient kAl is deduced for the atmospheric pressure MOVPE (AP\|MOVPE) growth of AlGaAs and based on this relation the data from AP\|MOVPE growth of AlGaAs are analyzed.

从固态组分控制方面，对ＡｌＧａＡｓ 的常压金属有机物气相外延（ＡＰ－ＭＯＶＰＥ）生长技术进行了研究。

In this paper,GaN films are grown by metal organic vapor phase epitaxy.

利用金属有机气相外延方法研究了非故意掺杂GaN薄膜的方块电阻与高温GaN体材料生长时载气中N2比例的关系。