同义词
1)magnetization magneto-microwave plasma etching system,磁场微波型等离子体蚀刻系统2)down stream plasma etching system,分离型等离子体蚀刻系统3)plasma etching system,等离子体蚀刻系统4)inductively coupled plasma etching system,感应耦合型等离子体蚀刻系统5)barrel type plasma etching system,圆筒型等离子体蚀刻系统6)magnetron enhanced reactive ion etaching system,磁控管增强型反应性离子蚀刻系统
