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The negative ion element will become the gas source center and form an ejection in the process of evaporation of coating material, so decrease the damage thre.

结果表明:金属元素、吸收性介质元素的存在对薄膜的损毁有很大负面影响;在紫外波段,Zr元素含量大的薄膜吸收较大;并且提出负离子(元素)在膜料蒸发过程中形成气源中心,产生喷溅,从而使薄膜的损伤阈值降低。

The weak absorption and laser induced damage threshold (LIDT) of HfO-2 thin film are measured to testify the negative-ion element impurities breakdown model.

探讨了HfO_2薄膜中负离子(元素)杂质破坏模型,并得出薄膜中的杂质主要来源于镀膜材料。