predeposit implant

The diffusion was researched through analyzing characteristics of the pre-deposition process and the drive-in process.

结合预淀积和再分布两种条件下扩散的特点,采用两步法工艺制备了高浓度硼深扩散硅片,研究了影响杂质浓度和扩散深度的再分布与预淀积时间比。

Effect of boron pre-deposition on size distribution of self-assembled Ge islands fabricated by UHV/CVD;

硼预淀积对自组织生长Ge量子点尺寸分布的影响

The result indicates that 5%-10% injected slurry volume can induce expanding pressure of 1.

针对搅拌桩施工会引起周围土体的位移及产生很高的超静孔隙水压力的工程现象,首先分析了搅拌桩施工中固化剂的注入体积与膨胀压力、成桩直径的关系。